For large-area substrates, VON ARDENNE has developed a cost-efficient flash lamp annealing solution, which has been successfully demonstrated in architectural glass coating at substrate widths of up to 3.8 meters (Figure 1).
For small-area substrates, like those used in the semiconductor industry, flash lamp annealing has already been successfully commercialized. However, for substrates with a width of more than 1.5 meters, current flash lamp annealing solutions are too expensive, because several flash lamp arrays have to be combined. This complex device assembly leads to a very high capital expenditure that is basically not affordable for companies in cost-sensitive industries. For large-area substrates, VON ARDENNE provides an annealing technology that is suited for substrates with a width of up to 3.8 meters.
