PiezoMEMS

Advanced Vacuum Deposition Equipment for Metallization

From smart­phones to smart­watches, piezo­elec­tric micro­electro­mechani­cal sys­tems (piezo­MEMS) pow­er the ti­ny sen­sors that make our de­vices re­spon­sive, in­tu­i­tive, and en­er­gy ef­fi­cient. With ultra-low pow­er con­sump­tion and high sen­si­tiv­i­ty, piezo­MEMS are the in­vis­ible force driv­ing the fu­ture of wear­able tech, IoT, and smart liv­ing.

The OPTA X plat­form a­chieves the ultra-pre­cise de­po­si­tion of high-per­for­mance piezo­elec­tric ma­te­ri­als such as AlN and AlScN. The materials are tail­ored for piezo­MEMS ap­pli­ca­tions due to their ex­cel­lent mechani­cal prop­er­ties, CMOS com­pat­i­bil­i­ty, and en­vi­ron­men­tal sta­bil­i­ty. These ad­vanced thin films fa­cil­i­ta­te the cre­a­tion of high­ly sen­si­tive sen­sors and ac­tu­a­tors by ef­fi­cient­ly con­vert­ing mechani­cal forces and dis­place­ments into e­lec­tri­cal sig­nals, and vice versa.

At VON AR­DENNE, we have ap­plied our ex­ten­sive ma­te­ri­als sci­ence and de­po­si­tion ex­pert­ise to sup­port this em­er­ging mar­ket. Our pro­cess is en­gi­neered to pro­vide re­li­able ho­mo­ge­ne­i­ty in both thick­ness and stoichiometry across 200-mm and 300-mm wafer sub­strates, op­timiz­ing through­put and yield in high-vol­ume man­u­fac­tur­ing.