The vertical inline sputter system VISS is an appropriate, modular solution for vertical deposition processes when scaling up from laboratory use to production. The tool is available either as a single end inline or for continuous processing and is uniquely suited for scaling up to substrate sizes of up to 600 mm x 2400 mm.
The substrates are transported by a carrier system, which is tilted vertically by seven degrees. The substrates can be loaded without touching their front side.
