Magnetron Sputtering
Key Technology from In-house Development & Manufacturing

One of our most important core technologies is magnetron sputtering. In this process, the coating material is removed from a solid target and transferred to the substrate.

This is done in a magnetic field-enhanced gas discharge in a vacuum. This discharge creates a plasma, a mix of electrons and positive gas ions. The positively charged ions are accelerated by an electric field onto the surface of the target, which is connected as a cathode. This knocks individual atoms out of the target surface.

These atoms condense on a substrate, for example glass, and form the functional layer. The substrate is either continuously moved past the magnetron sputter source (dynamic coating) or exposed to the vapor flow for a defined time (static coating). In dynamic coating, the thickness of the layer is determined by the rate of material removal from the target and the speed at which the substrate passes. In static coating, the dwell time determines the thickness.

Magnetron sputtering can be used for a variety of metallic and ceramic coating materials. Depending on the process, complex coatings with a thickness of up to several hundred nanometers can be deposited very efficiently and with high uniformity on large areas. Depending on the application, tubular or planar targets are used, the length of which can be scaled with the width of the substrates to be coated.

Magnetrons are key components at VON ARDENNE.  We develop and manufacture the magnetrons in-house. This allows us to incorporate the extensive knowledge we have gained from hundreds of delivered systems and components.

Would you like to learn more? Then click on the content below or contact us directly.


Very extensive process know-how

for a wide range of sputtering applications

Deposition of complex layer systems

of high homogeneity on small and large areas

Wide portfolio of different magnetron types

from in-house development & manufacturing

Magnetron Sputtering: How It Began and How VON ARDENNE Became a Technology Pioneer

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Magnetron Sputtering: How Microelectronics Became the Driving Force in its Development

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How Proven Plasma Components Help Reduce Costs & Improve Quality

A Chinese proverb says "一根筷子容易折, 一把筷子难折断’", meaning ‘one chopstick can be easily broken while a bundle of chopsticks cannot’. If you apply this…

The Development of Process Control Systems for Sputtering

The process control of sputter processes has a long history and many sensors and approaches have been studied and employed. But how has it been…

Accelerating PV production with VON ARDENNE: Market leader for PVD coating technology scales portfolio for next-level gigawatt production of high-efficiency solar cells

VON ARDENNE will present the next expansion stage of its highly productive PVD1 coating systems for the manufacturing of high-efficiency cells at the…

24.06.2024 - 26.04.2024
ICCG Dresden 2024

Booth: Messe Dresden, Halle 3

02.09.2024 - 05.09.2024
PSE Conference Erfurt 2024

Booth: Messe Erfurt

09.09.2024 - 12.09.2024
RE+ Anaheim 2024

Booth: Marriott Hotel / 1317
Anaheim, CA, USA

22.10.2024 - 25.10.2024
glasstec 2024

Booth: 12 / 12C55
Messe Düsseldorf

12.11.2024 - 13.11.2024
FC3 Conference Chemnitz 2024

Carlowitz Congresscenter Chemnitz
Theaterstraße 3
09111 Chemnitz

Ronny Borchel

Product Manager Plasma ComponentsVON ARDENNE GmbH

SALES Contact

Am Hahnweg 8
01328 Dresden