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AlN-based PiezoMEMS

From smartphones to smartwatches, piezoelectric Micro-Electro-Mechanical Systems (piezoMEMS) power the tiny sensors that make our devices responsive, intuitive, and energy-efficient. With…

Advanced Packaging - Metallization of high-aspect-ratio structures

Metallization of high-aspect-ratio structures on wafers & panel-level substrates with good adhesion & conformity

Advanced Packaging

Advanced packaging offers a variety of possibilities to efficiently connect chips of different technologies.  Increasingly complex electronic systems are being manufactured in…

FOSA CX

The FOSA CX is a compact production system for the roll-to-roll deposition of thin functional layers on polymer films. It is ideal for high-volume production and is optimized for single…

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Electronics

The importance of electronics and its miniaturization is constantly growing. This development is driven by industrial megatrends such as electromobility, autonomous driving, energy transition,…

Electronics - High-quality electronics

High-quality electronics with efficient & modular equipment through vacuum coating

Flexible Photovoltaics - Establishing production of flexible solar modules

Establishing production of flexible solar modules on scalable equipment solutions with joint process development

FOSA MX

The FOSA MX is a web coating system with a modular design. It is ideal for high-volume production and can be configured with up to three separate coating chambers. Furthermore, it features an…

Flexible Photovoltaics - Highest productivity

Highest productivity through equipment design for large-area coating