VA PROCOS 2
Process Control System for Reactive Sputtering

VA PROCOS 2 is a modular process control system specifically designed for stabilizing reactive sputtering processes in critical transition mode.

It is suitable for process characterization by optical emission lines, cathode voltage, oxygen partial pressure, combinations thereof as well as further PLC signals.

In addition, it can be used to stabilize the plasma discharge and thus the product properties. This is achieved by adjusting the supply of one or more reactive gases.

VON ARDENNE has been a leader in reactive sputtering processes since 1980. In addition, we have been offering our process control system VA PROCOS for many years and have optimized it continuously.

Our current system VA PROCOS 2 controls the reactive magnetron sputtering of composite layers (such as ITO, TiO2, TiN, Al2, O3, AlN, SnO2, SiO2, Si3N4, ZnO, ZrO or Ta2O5 ) and provides reliable stability of the operating points at the critical transition areas. The system also reliably controls one or more inlets for reactive gases (e.g. oxynitrides).

Would you like to learn more? Then take a look at the brochure, or contact us directly.

Reliable & ndustry-proven control

for reactive sputtering of all common layer systems

Easily configurable with external components

for all reactive sputtering applications

Continuous quality assurance

and parameter control

Media
No news available.
CONTACT
27.09.2023 - 28.09.2023
H2 Technology Expo Bremen 2023

Booth: 5H130
Bremen, Messe

01.10.2023 - 04.10.2023
Titanium Denver 2023

Booth:  581
Denver, Gaylord of the Rockies Resort

04.10.2023 - 06.10.2023
REI India 2023

Noida, India Expo Center Greater Noida

16.10.2023 - 19.10.2023
SPIE Optifab Rochester 2023

Rochester, Joseph A. Floreano Riverside Convention Center

05.11.2023 - 11.11.2023
AVS Symposium & Exh. Portland 2023

Portland, Oregon Convention Center

Search