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Cluster Systems Details - CS400PS

CS400PS Cluster system for R&D and medium-volume production

Cluster Systems Details - CS400S

CS400S Cluster system for high-volume production

Cluster Systems Details - R&D<br>Tool

R&DTool Sputter chamber with load chamber for one substrate

Cluster Systems Details - Loading/­ Unloading Station

Loading/­ Unloading Station The entry load lock chamber enables substrate loading without venting the process chambers of the system. Different versions are available featuring single substrate…

Cluster Systems Details - Cluster Systems

Cluster Systems Modular, flexible & cost-effective

Cluster Systems Details - Load Lock with Magazine

Load Lock with Magazine

Cluster Systems Details - Load Lock with Transfer Unit

Load Lock with Transfer Unit

Cluster Systems Details - Load Lock

Load Lock

Cluster Systems Details

Our cluster systems are based on a platform with many modular units. Therefore, every tool can be configured according to your specific applications. On top of that, special features can be…

Cluster Systems Details - Coating Chambers

Coating Chambers The coating chambers can contain different process modules. The available coating processes are sputtering (planar or focal), thermal and e-beam evaporation and PECVD. For…