Wafer-Level Optics

Coating Equipment for Precision Optical Components

Op­ti­cal fil­ter lay­ers de­pos­it­ed di­rect­ly on glass or semi­con­duc­tor wa­fers en­able op­ti­cal prod­ucts that have a very small size and a com­pet­i­tive price-per­for­mance ra­tio. There­fore, they have found their way in­to var­i­ous mar­kets such as con­sum­er elec­tron­ics or the au­to­mo­tive in­dus­try. Due to the in­creas­ing de­mand for high-vol­ume pro­duc­tion, wa­fer-lev­el op­tics are be­com­ing the fo­cus of the in­dus­try.

With the OPTA X, we of­fer you a coat­ing sys­tem that has been spe­cial­ly de­vel­oped to meet the re­quire­ments in the fields of pho­ton­ics and wa­fer-lev­el op­tics.

For mul­ti­lay­er coat­ing of wa­fer-based mi­cro­lens ar­rays, semi­con­duc­tor sen­sors or fil­ter-on-chip CMOS, the OPTA X pro­vides you with ful­ly au­to­mat­ed, SEMI-com­pat­i­ble wa­fer han­dling for in­te­gra­tion in­to semi­con­duc­tor fabs. In ad­di­tion to wa­fers with a di­am­e­ter of 200 mil­li­me­ters, the OPTA X is al­so suit­able for wa­fer siz­es up to 300 mil­li­me­ters.