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1592 results:

PiezoMEMS - Superior material properties

Superior material properties through highly engineered deposition processes

URL: /industries-applications/piezomems/#c6987 Learn more

Cluster Systems - CS300

CS300 Ideal for applications in the semiconductor, optics, and PV industries Optimized for R&D and production of TOPCon and perovskite tandem solar cells

URL: /products/cluster-systems/#c48204 Learn more

Cluster Systems - CS200

CS200 Ideal for applications in the semiconductor and optics industries High throughput Compact dimensions

URL: /products/cluster-systems/#c48195 Learn more

Cluster Systems

The cluster systems CS200 and CS300 are modular coating systems suitable for highly flexible or highly productive processes in the development and production of semiconductor, optics, or…

URL: /products/cluster-systems/#c3820 Learn more

MEMS - Fully automated platforms

Fully automated platforms drive cost efficiencies

URL: /industries-applications/mems/#c7128 Learn more

MEMS - Compact design

Compact design saves valuable fab floorspace

URL: /industries-applications/mems/#c7119 Learn more

MEMS - High-flexibility, configurable equipment

High-flexibility, configurable equipment easily supports new processes & requirements

URL: /industries-applications/mems/#c7126 Learn more

MEMS

Micro-electro-mechanical systems (MEMS) are tiny devices that combine the properties of mechanical and electronic components. They are used in a wide range of applications, including sensors,…

URL: /industries-applications/mems/#c7122 Learn more

VISS - VISS600

VISS600 High productivity thanks to substrate widths up to 600 mm

URL: /products/viss/#c48240 Learn more

VISS - VISS400

VISS400 Compact dimensions and low weight enable use in confined production spaces

URL: /products/viss/#c48231 Learn more
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