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Cleanroom - VA CLEANROOM

VA CLEANROOM Our new cleanroom offers the best conditions with ISO5 and ISO7 zones for the assembly and commissioning of systems for complex tasks in the fields of semiconductor technology as well…

URL: /engineering/cleanroom/#c48033 Learn more

OPTA X - OPTA X300

OPTA X300 Processing substrates with diameters of up to 300 mm, including G12 wafers Meets the highest demands in optical applications through highly pure and defect-free optical layers …

URL: /products/opta-x/#c48222 Learn more

OPTA X - OPTA X200

OPTA X200 Optimized for applications on substrates with diameters of up to 200 mm Meets the highest demands in optical applications through highly pure and defect-free optical layers …

URL: /products/opta-x/#c48213 Learn more

HISS - Highly Flexible & Scalable Inline Systems

Highly Flexible & Scalable Inline Systems with a modular design For horizontal substrate transport

URL: /products/hiss/#c3852 Learn more

VISS - Highly flexible & scalable inline systems

Highly flexible & scalable inline systems smooth transition from R&D to production For vertical processes & medium productivity

URL: /products/viss/#c3791 Learn more

MEMS - Highly configurable systems for next-generation MEMS manufacturing

Highly configurable systems for next-generation MEMS manufacturing for metallic, non-metallic, optical & semiconducting layers engineering highly customized multi-process support

URL: /industries-applications/mems/#c7117 Learn more

Cluster Systems - Highly flexible & scalable cluster systems

Highly flexible & scalable cluster systems with modular design For research, development & production

URL: /products/cluster-systems/#c3815 Learn more

Advanced Packaging - Metallization for the next generation<br>of advanced packaging

Metallization for the next generationof advanced packaging for high-aspect-ratio structures with excellent material adhesion & uniformity

URL: /industries-applications/advanced-packaging/#c7110 Learn more

Semiconductors - Engineering tomorrow’s semiconductor deposition solutions

Engineering tomorrow’s semiconductor deposition solutions with an experienced partner through advanced materials innovation & process development

URL: /industries-applications/semiconductors/#c7129 Learn more

PiezoMEMS - Overcoming film challenges<br>for sensors & actuators

Overcoming film challengesfor sensors & actuators using flexible, high-productivity equipment with high-precision deposition of finely tuned piezo layers

URL: /industries-applications/piezomems/#c6985 Learn more
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