Search results

1592 results:

Cluster Systems Details - Load Lock with Transfer Unit

Load Lock with Transfer Unit

URL: /products/cluster-systems/cluster-systems-details/#c36962 Learn more

Cluster Systems Details - Load Lock

Load Lock

URL: /products/cluster-systems/cluster-systems-details/#c36964 Learn more

Cluster Systems Details

Our cluster systems are based on a platform with many modular units. Therefore, every tool can be configured according to your specific applications. On top of that, special features can be…

URL: /products/cluster-systems/cluster-systems-details/#c36930 Learn more

Cluster Systems Details - Coating Chambers

Coating Chambers The coating chambers can contain different process modules. The available coating processes are sputtering (planar or focal), thermal and e-beam evaporation and PECVD. For…

URL: /products/cluster-systems/cluster-systems-details/#c36947 Learn more

Cluster Systems Details - Sputtering Focal

Sputtering Focal

URL: /products/cluster-systems/cluster-systems-details/#c36946 Learn more

Cluster Systems Details - Sputtering Planar

Sputtering Planar

URL: /products/cluster-systems/cluster-systems-details/#c36945 Learn more

Cluster Systems Details - Evaporation

Evaporation

URL: /products/cluster-systems/cluster-systems-details/#c36944 Learn more

Cluster Systems Details - PECVD

PECVD

URL: /products/cluster-systems/cluster-systems-details/#c36943 Learn more

Cluster Systems Details

URL: /products/cluster-systems/cluster-systems-details/#c36948 Learn more

Cluster Systems Details - Transfer Chambers

Transfer Chambers The transfer chambers are equipped with an automatic handling system, which enables a safe transport of the substrates and carriers through the individual chambers of the system. …

URL: /products/cluster-systems/cluster-systems-details/#c36938 Learn more
Search results 401 until 410 of 1592
Search