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Cluster Systems Details - PECVD

PECVD

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Cluster Systems Details

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Cluster Systems Details - Transfer Chambers

Transfer Chambers The transfer chambers are equipped with an automatic handling system, which enables a safe transport of the substrates and carriers through the individual chambers of the system. …

URL: /products/cluster-systems/cluster-systems-details/#c36938 Learn more

Cluster Systems Details - 4 Ports

4 Ports

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Cluster Systems Details - 6 Ports

6 Ports

URL: /products/cluster-systems/cluster-systems-details/#c36936 Learn more

Cluster Systems Details - 8 Ports

8 Ports

URL: /products/cluster-systems/cluster-systems-details/#c36935 Learn more

Cluster Systems Details - Configuration Examples

Configuration Examples

URL: /products/cluster-systems/cluster-systems-details/#c36972 Learn more

Cluster Systems Details

URL: /products/cluster-systems/cluster-systems-details/#c36939 Learn more

Cluster Systems Details - Batch System

Batch System Evaporation batch system for R&D and small-volume production

URL: /products/cluster-systems/cluster-systems-details/#c36970 Learn more

Cluster Systems Details - CS400ES

CS400ES Cluster system for R&D and small-volume production

URL: /products/cluster-systems/cluster-systems-details/#c36969 Learn more

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