Vacuum Coating Equipment

Micro-Electro-Mechanical Systems (MEMS) are tiny devices that combine mechanical and electronic components. They are used in a wide range of applications, including sensors, display technologies and microfluidics.

We offer you flexible vacuum deposition systems for MEMS manufacturing. They enable you  to combine different technologies, such as etching, deposition of metallization, semiconductor and passivation layers, a post-treatment or even customized requirements, depending on the specific application.

Would you like to learn more? Then click on the content below or contact us directly.

Easy adaptation to new processes & requirements

due to flexibly configurable equipment

Floor space is saved

due to compact design

Cost-efficient equipment

due to fully automated concept

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05.11.2023 - 11.11.2023
AVS Symposium & Exh. Portland 2023

Portland, Oregon Convention Center

14.11.2023 - 17.11.2023
SEMICON Europa 2023

Booth: B2 / 461
München, Messe

29.11.2023 - 01.12.2023
Vacuum Show Japan 2023

Booth: West Hall / 581
Tokyo, Big Sight

Dr. Frank Hinze

Industry ManagerVON ARDENNE GmbH