Vacuum Coating Equipment

Micro-Electro-Mechanical Systems (MEMS) are tiny devices that combine mechanical and electronic components. They are used in a wide range of applications, including sensors, display technologies and microfluidics.

We offer you flexible vacuum deposition systems for MEMS manufacturing. They enable you  to combine different technologies, such as etching, deposition of metallization, semiconductor and passivation layers, a post-treatment or even customized requirements, depending on the specific application.

Would you like to learn more? Then click on the individual products below or contact us directly.

Easy adaptation to new processes & requirements

due to flexibly configurable equipment

Floor space is saved

due to compact design

Cost-efficient equipment

due to fully automated concept

No news available.
22.09.2024 - 27.09.2024
European Microwave Week Paris 2024

Booth: 940B
Paris Convention Centre, 1 place de la Porte de Versailles 75015 Paris

12.11.2024 - 15.11.2024

Booth: Stand  C2-453
Messe München

Dr. Frank Hinze

Industry ManagerVON ARDENNE GmbH