CLUSTER SYSTEMS

for Research, Develop­ment & Production

Our clus­ter sys­tems are mo­du­lar coa­ting sys­tems sui­ta­ble for high­ly fle­xi­ble and high­ly pro­duc­ti­ve pro­ces­ses in the de­ve­lop­ment and pro­duc­tion of se­mi­con­duc­tors, op­tics, or in pho­to­vol­ta­ic ap­pli­ca­ti­ons. They are spe­ci­fi­cal­ly de­si­gned for pro­ces­sing sub­stra­tes with a dia­me­ter or wi­dth of up to 300 mil­li­me­ters.

This ma­kes them ide­al for de­ve­lo­ping new coa­ting tech­no­lo­gies and for pro­du­cing lay­ers or stacks with dif­fe­rent ma­te­ri­als, tai­lo­red pro­per­ties, high pre­ci­si­on, and ex­cel­lent re­pro­du­ci­bi­li­ty.

Ty­pi­cal ap­pli­ca­ti­ons in­clu­de MEMS, wi­de-band­gap or ul­tra-wi­de-band­gap (WBG/UWBG) de­vi­ces and through-si­li­con vi­as (TSVs) for 3D ad­van­ced-pack­a­ging ap­pli­ca­ti­ons in the se­mi­con­duc­tor in­dus­try, as well as stan­dard con­duc­ting or in­su­la­ting lay­ers. Clus­ter sys­tems can al­so be used to de­ve­lop next-ge­ne­ra­ti­on so­lar cells such as TOP­Con and pe­rov­skite tan­dem.