MEMS

Vacuum Coating Equipment

Micro-Electro-Mechanical Systems (MEMS) are tiny devices that combine mechanical and electronic components. They are used in a wide range of applications, including sensors, display technologies and microfluidics.

We offer you flexible vacuum deposition systems for MEMS manufacturing. They enable you  to combine different technologies, such as etching, deposition of metallization, semiconductor and passivation layers, a post-treatment or even customized requirements, depending on the specific application.