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MEMS - Fully automated platforms

Fully automated platforms drive cost efficiencies

MEMS - Compact design

Compact design saves valuable fab floorspace

MEMS - High-flexibility, configurable equipment

High-flexibility, configurable equipment easily supports new processes & requirements

MEMS

Micro-electro-mechanical systems (MEMS) are tiny devices that combine the properties of mechanical and electronic components. They are used in a wide range of applications, including sensors,…

VISS - VISS600

VISS600 High productivity thanks to substrate widths up to 600 mm

VISS - VISS400

VISS400 Compact dimensions and low weight enable use in confined production spaces

Optical Windows - Up to 50 % less manpower required

Up to 50 % less manpower required due to fully automated recipe control, carrier handling & substrate loading

PiezoMEMS - Extremely high productivity

Extremely high productivity keeps operating costs low

PiezoMEMS - Modular design ensures flexible system configuration

Modular design ensures flexible system configuration to address any process requirement 

PiezoMEMS

From smartphones to smartwatches, piezoelectric micro-electro-mechanical systems (piezoMEMS) power the tiny sensors that make our devices responsive, intuitive, and energy efficient. With…