XEA|nova® L
Inline Coating System

If you are looking for a highly productive and flexible production system combined with proven technology and design, the XEA|nova L is the perfect choice for you.

The inline coating system is based on our patented coating technology for large substrate areas. The system is wide and can therefore process many substrates simultaneously. Therefore, it is particularly suitable for applications with high productivity at very low costs. With the XEA|nova L, you can coat silicon wafers or other small substrates. It is also suitable for very thin substrates.

Thanks to its modular design, the XEA|nova L can be equipped with magnetrons with rotating targets for sputter deposition of high performance TCO layers or various other materials such as metals and metal oxides. It can also be adapted for other deposition technologies. Substrates can also be pre-treated in the system by cleaning or etching, either under vacuum or before entering vacuum.

Would you like to learn more? Then take a look at the brochure, or contact us directly.

Exceptionally productive

due to large width

Easily adaptable to new processes & requirements

due to flexible & modular design

Low downtime

due to quick and easy maintenance

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Trade fairs
29.03.2023 - 31.03.2023
MECSPE 2023

Booth: 14 / E36
Bologna, BolognaFiere

13.04.2023 - 14.04.2023
nPV Workshop Delft 2023

Delft, Technical University

19.04.2023 - 22.04.2023
TiExpo Baoji 2023

Booth: B / 360
Baoji, Exhibition Center

 

25.04.2023 - 26.04.2023
OptecNet Fürstenfeldbruck 2023

Fürstenfeldbruck, Veranstaltungsforum

30.04.2023 - 04.05.2023
SPIE Defense Orlando 2023

Booth: 1621
Orlando, Gaylord Palms Resort & Convention Center

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Sales Team

Am Hahnweg 8
01328 Dresden
Germany